Deposition of ZnO multilayer on LiNbO3 single crystals by DC-magnetron sputtering- July 2011
M Shirazi, MT Hosseinnejad, A Zendehnam, Z Ghorannevis, and M Ghoranneviss- Applied Surface Science, 2011
Zinc oxide (ZnO) thin films were deposited on LiNbO3 (LN) single crystals with 200 nm thicknesses by three different ways, where coating of zinc (Zn) film was followed by thermal oxidation for four, two, and one steps with 50, 100, and 200 nm thicknesses repeatedly. Sample, which was produced at 4-step of deposition and oxidation of Zn layer, showed high transmittance and low structural defect due to a lower photoluminescence intensity and Urbach energy. Average grain size in X-ray diffraction (XRD), scanning electron microscopy (SEM) micrograph, and atomic force microscopy (AFM) images for multilayer of ZnO was lower than monolayer of ZnO thin films. Applying multilayer coating technique leads to decrease of surface roughness and scattering on light on surface and fabrication of LiNbO3waveguides with lower optical loss … Photoluminescence (PL) spectra, (Stellar Net EPP-200) were taken at room temperature under 340 nm xenon lamps as the excitation source. The ZnO film structure was studied by X-ray diffraction (XRD), (X’pert PW 3373) using Cu Kα (λ = 1.54 Å) radiation.
