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     Thin Film Measurement Systems

TF Systems for Non-Contact
Film Thickness Measurements

 

Thin Film PDF Download

StellarNet TF Measurement Guide

 

We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 µm for analysis of single layer and/or multilayer films in less than a second.  StellarNet thin film reflectometry systems consist of a portable USB spectrometer coupled to a reflectance probe and light source. The optical properties are obtained  from reflection and thickness is measured by detecting the sinusoidal fringe pattern from the sample's specular reflectance.  Several  spectrometer models are available to suit your thin film and/or optical measurement requirements.
 

Email your application requirements to ThinFilm_Experts@StellarNet.us

 

TF-C-UVIS-SRN Dual Spectrometer Thin Film Measurement system for wavelength range 200-1700nm and layer thickness values of 50A-200um

 

Thin Film System Features 

  • Real-time Spectral Capture and Instrument control for Reflectance and/or Transmittance

  • Includes Large Library of Materials Data

  • Supports multilayer, freestanding, rough, and both thick and thin layer structures

  • New materials easily added

  • Supports Parameterized materials: Cauchy, Sellmeir, EMA (effective-medium approximation), Harmonic oscillator, Tauc-Lorentz oscillator, Drude-Lorentz

TF Software

Thickness and optical constants (n and k) can be measured quickly and easily using powerful user-friendly software which make daily complex measurements quick and simple.

TF software includes a large library of materials data that enables measurement of the wide range of layer structures: multilayer, freestanding, rough, thick and thin layer structures are supported. New materials can be added easily by measuring corresponding sample or importing data from the text file.

The measurement process consists of two steps: data acquisition and data analysis. TF Systems defines all the process in a measurement recipe and makes it transparent to the user. At the same time the user has the ability to store measured data and analyze it later.

TF supports Parameterized materials e.g. Cauchy, Sellmeir, EMA (effective-medium approximation), Harmonic oscillator, Tauc-Lorentz oscillator, Drude-Lorentz and many more approximations. These approximations represent optical dispersion of materials in desired spectral range using few coefficients that can be adjusted. For example, oxides are frequently represented using Cauchy and glasses using Sellmeir approximation, amorphous materials (e.g. SiNx, aSi) can be represented using Tauc-Lorentz and phase-mixed materials (e.g. poly-Si) using EMA approximation.

Measurements are made using: reflectance/transmittance spectroscopy which measures the optical response of the layer structure. The user creates an optical model of the layer structure and uses data analysis to determine physical properties: the results are inferred from the best fit of measured and modeled data. TF software provides many options to easily analyze simple and most complex filmstacks, graded layers, periodic structures, very thick films, films on thin substrates, multi-sample measurements, etc.  Simulation and error-estimator tools allow user better understand data and the expected precision.

During in-situ, in-line or other long running measurements conditions like surface roughness, ambient light, etc. may be changing. TF software supports roughness and scaling correction that allows factoring in these effects.

From most simple, routine measurements to multilayer, multi-sample analysis - our software is ready to help!

Transmittance of a free standing polymer. 
Estimated thickness is ~ 81.9um

MODBUS TCP Server Add-on
The Modbus server plug-in provides a communication interface over TCP IP. TF software is deployed as a server and supports external program integration. This allows user to send a measurement request from any program and receive back the thickness results data.

System Accessories

 R600 Reflectance Probe has both illumination and read fibers bundled together coupling to the system. The new, improved reflectance probe holder allows for variable distance from sample.



 

TF-STD1 Thin Film standards for thickness measurement verification. Includes Si substrate for reference with 2 additional SiO2 substrates -

100nm and 1000nm thickness.

 

 

*System prices below include probe, stand and light source.  TF-STD1 standards are additional cost.  Contact ThinFilm_Experts@StellarNet.us for a quote!

 

 

Power and InterFace
Portable spectrometers include a USB-2 interface cable and interface to any 32-bit pc for a portable or tabletop measurement system.

 

 

Vacuum Deposition
Vacuum deposition is a family of processes used to deposit layers atom-by-atom or molecule-by-molecule at sub-atmospheric pressure on a solid surface. The layers may be as thin as one atom to millimeters thick (freestanding structures). There may be multiple layers of different materials (e.g. optical coatings). A thickness of less than one micrometer is generally called a thin film while a thickness greater than one micrometer is called a coating. StellarNet Thin-Film measurement systems can be used to check deposition thickness of a wide range of materials. Please contact ThinFilm_Experts@StellarNet.us to discuss your application.

 

 

Thin Film Applications

 

Solar PV
Increased production of Thin-Film Photovoltaics (TFPVs) is becoming more predominant due to lower costs than their silicon-wafer-based cousins.   Getting the accurate thickness measurement is extremely crucial to efficiency and reliability as well as maintaining production costs.  Films include active layers such as thin silicon, II-VI materials such as CdTe, and CIGS (copper indium gallium selenide).  Additionally,  TCO (transparent conductive oxide) stacks, polyimides and resists used to define cells and electrodes, as well as anti-reflection coatings can all be measured with StellarNet Thin Film Measurement systems.

 


CdS/CIGS stack results
Fit measured vs. generated data

   

Semiconductors
StellarNet systems can measure thickness of non-metallic semiconductor process films. Also, StellarNet Thin Film Measurement systems can be used to locate and identify the cause of failure in integrated circuits. Systems are also used during MEMS patterning processes to measure photoresist thickness and uniformity. These systems are also being used during silicon etching to measure etch rate and membrane thickness and uniformity. Thickness measurement of thick polysilicon films and SOI are also common applications.

 

Polymer Films
Polymer films such as PET and polycarbonate
require monitoring of film thickness during manufacturing. Please contact ThinFilm_Experts@StellarNet.us to discuss your application.

Displays
Most flat panel displays including LCD, OLED, and many other display technologies employ transparent conductive oxides (TCOs) to transport current and to each light emitting element of the display. StellarNet Thin-Film Measurement Systems can be used to measure thickness of Liquid Crystal layers such as polyamide, hardcoat, and air gap. And for OLED displays systems are able to measure layers such as emissive, injection, buffer, and the encapsulation layer. 
Optics
Optical coatings are used to enhance the reflectance and transmittance properties of a substrate material. StellarNet Thin-Film Measurement systems can be used to measure anti-reflection, increased reflection coatings, high-pass, low-pass, and band pass filters. StellarNet spectrometer systems also come with SpectraWiz Software for CIELAB colorimetry. See our colorimeter page.














Anti-reflection coating (SiNx) is represented
using Tauc-Lorentz oscillator

Ophthalmic Lens Coatings
StellarNet Thin-Film Measurement Systems can be used to measure coatings on Ophthalmic Lenses. Spectral reflectance can be used to measure anti-reflectance coatings on lenses as well as hardcoat and hydrophobic layer thickness.

 

Metals Films
StellarNet Thin-Film Measurement systems have been used to measure the thin metal films in various applications. Please contact ThinFilm_Experts@StellarNet.us to discuss your application.

 

Parylene Coatings
Parylene and a variety of poly (p-xylylene) polymers are used extensively as moisture barriers and electrical insulators and their coating thicknesses can be measured via reflectance spectroscopy.  Parylene applications included coatings for printed circuit boards and medical devices such as stents and pacemakers, permanently implanted in the body.
 

Hardcoat Measurements
Many industries use hardcoats and various protective coatings.  Layer thickness and thickness monitoring is extremely important for manufacturing and quality control. 

 

Thick Resists
Thick photoresists such as SU-8, a commonly used epoxy based negative photoresist normally spun in layers from 0.1um to 2mm. Monitoring of thickness can be crucial during production and fabrication of multilayer stacks.

      Basic Specifications

Precision 0.1Å or 0.01% (greater of) Standard deviation of 100 thickness reading of 100nm SiO2/Si calibration sample
Accuracy 0.2% or 10A (greater of) Film stack dependent
Stability 0.2A or 0.02% (greater of) 2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample
Spot size 3 mm standard, optional down to 3 µm  
Sample size from 1 mm  

             System Pricing

System

Range

Resolution

Thickness

Lamp type

Price

TF-VIS

400-1000nm

<2nm

150A-20um

Halogen      SL1

$ 9,950

TF-C-UVIS   

190-850nm

<2nm

50A-20um

Deuterium  SL3

$11,320 

TF-C-UVIS-SR

220-1100nm

<2.5nm

50A-20um

SL1-F+ SL3

$12,915 

TF-NIR

900-1700nm

<5nm

1000A-200um

Halogen      SL1

$20,575

TF-VIS-NIR

400-1700nm

<2nm,  5>1000

150A-200um

Halogen      SL1

$23,075

TF-C-UVIS-SRN

200-1700nm

<2nm,  5>1000

50A-200um

Hal+Deut    SL4

$25,900  

Thin Film PDF Download

StellarNet TF Measurement Guide

   
           
 

Reach us at +1-813.855.8687 • Fax +1- 813.855.0394

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